JEOL JXA-iSP100 EPMA

A W-filament electron probe microanalyser (EPMA) equipped with 5x wavelength dispersive X-ray spectrometers (WDS), a JEOL DrySD energy dispersive X-ray spectrometer (EDX) & a panchromatic cathodoluminescnce detector. The WDS detectors allow for determination of the local composition of materials with greater precision and down to lower concentration than with EDX.